A novel non-contact metrology method called “Tilted Wave Front Interferometry (TWI)” makes use of the multi-axis flexibility and accuracy of hexapod parallel kinematics 6-axis motion systems to position a calibration sphere.
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A novel non-contact metrology method called “Tilted Wave Front Interferometry (TWI)” makes use of the multi-axis flexibility and accuracy of hexapod parallel kinematics 6-axis motion systems to position a calibration sphere.
Learn more